銅箔基板
厚度測量
CCL Laser Metrology System
規格
Laser Heads: Keyence CL-P030 x 6
CCL Measure Size: 1200x1200mm
Stage Type: X-Y Gantry Mode
Measuring Base: Ceramic Platen
Air Bearing Support
Drive Motor : Linear Motor
CCL Measure Size: 1200x1200mm
Stage Type: X-Y Gantry Mode
Measuring Base: Ceramic Platen
Air Bearing Support
Drive Motor : Linear Motor